The first stage of Atomic Layer Deposition (ALD) is the adsorption of a precursor molecule onto the substrate surface. This is done by exposing the substrate to a vapor-phase precursor, such as an organometallic compound. The precursor molecule binds to the substrate surface, forming a monolayer of molecules that are evenly distributed over the surface. This monolayer acts as a template for subsequent ALD processes. After the adsorption step, a second precursor is then introduced, and the reaction between the two precursors generates a thin film of material on the substrate surface. The ALD process is then repeated until the desired thickness of the film is achieved.
The adsorption step is an important factor in determining the quality of the final film. If the adsorption is not done properly, the film will be unevenly distributed and could contain defects. The adsorption step also affects the uniformity of the film, as a non-uniform adsorption can result in a non-uniform film. The adsorption step is also important for controlling the growth rate of the film, as the reaction between the precursors is limited by the adsorption rate.